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Semiconductor inspection microscope stage

31st October 2016

Posted By Paul Boughton


The H116 motorised stepper stage from Prior Scientific is suitable for use with larger microscopes and can easily accommodate 8 inch (200mm) wafers and a variety of large specimens, making it perfect for performing scanning of a wide range of semiconductor wafers, photo masks, flat panel displays, and printed circuit boards.

Offering a travel range of over 255 x 216 mm, the large area scanning capability of the H116 stage is exceptionally precise, with a minimum step size of 0.04 microns and a repeatability of +/-0.7 microns. The accuracy of the H116 stage, which is enhanced by Prior's patented Intelligent Scanning Technology (IST), is unmatched. Precision can be further improved with the addition of 100nm encoders for challenging applications requiring the very highest precision.

A range of sample holders are available and stage inserts can be customised for virtually any semiconductor inspection application, meaning that the H116 stage combines high precision with versatility.

Manufactured using the highest quality components - precision bearings, zero backlash recirculating ball screws, X and Y limit switches, two high precision stepper motors and a tough scratch resistant coating - the H116 stage is built to provide trouble-free operation over an extended period of time.









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