CyberOptics has announced the launch of its next generation Airborne Particle Sensor (APS3) with new ParticleSpectrum software. CyberOptics’ WaferSense APS3 speeds equipment set-up and long-term yields in semiconductor fabs by wirelessly detecting, identifying and monitoring airborne particles in real-time. CyberOptics’ Airborne Particle Sensors, documented as the best known method (BKM), have proven to deliver up to 90% time savings, 95% expense reduction and up to 20 times the throughput with half the manpower relative to legacy surface scan wafer methods.
The APS3 measurement devices are even thinner and lighter to travel through semiconductor tools with ease, while providing the accuracy and sensitivity valued by equipment and process engineers around the world. The APS3 solution incorporates ParticleSpectrum software – a completely new, touch-enabled interface with user-friendly functionality, making it simple to read in real-time, record and review small to large airborne particle data.