Infrared temperature sensor for semiconductors and metals

Paul Boughton

It is now possible to measure the temperature of reflective metals and semiconductors, as low as 350°C, at low cost and without contact.

The new PyroMini 0.9 infrared  can view into a vacuum chamber through a quartz or glass window, and measure the temperature of the surface of the silicon wafer. Temperature ranges from 350°C to 2000°C are available, and the low-temperature 350°C to 800°C model opens up new opportunities for temperature monitoring and control in silicon wafer processing.

Stable and repeatable measurements can be taken continuously for long periods, with a fast response time of just 240 milliseconds. With the optional MicroSD Card installed, over a year of data can be logged, even at the fastest sample rate of one reading per second.

The highest possible accuracy is provided by the PyroMini 0.9’s short-wavelength detector, which ensures that any error in emissivity setting or change in emissivity has the minimum effect on the measurement.

Miniature sensing head:

* Dimensions 18 x 45 mm, stainless steel 316, sealed to IP65;

* Cable length of up to 30 m available.

Electronics module with optional touch screen:

* Large, bright temperature display;

* Visual alarm indication;

* Scrolling temperature graph;

* Full sensor configuration;

* Basic models available without a screen.


* Choice of 4-20 mA or RS485 Modbus output;

* 2 x alarm relays on touch screen models that could be connected to alarm equipment directly, without a separate trip amplifier.

Accessories are available including mounting brackets, air purging and laser sighting.