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Increasing adhesion of high-stress films to ceramic components

Morgan Technical Ceramics has introduced a new technology that it says can significantly improve process residue adhesion, decrease process-related defects and increase yields during the manufacturing of integrated circuits.

The technology, Sharkskin, replaces traditional methods of roughening ceramic surfaces, such as grit blasting or twin-wire arc sprays.
 
Sharkskin involves the highly controlled texturing of the surface of ceramic components.  This texturing does not contaminate or destroy the integrity of the surface of the part as grit blasting does and, unlike arc sprays, is an integral and indistinguishable part of the ceramic surface. In addition, traditional technologies have reached their adhesion limits, rendering them ineffective for devices smaller than 65 nm.

Sharkskin is a technological advancement that increases the adhesion of high-stress films to ceramic components.

At roughnesses of up to 1200µ Ra, a two-fold adhesion improvement over twin wire arc spray and plasma spray ceramic films has been demonstrated.  The increased adhesion can prevent process residues on chamber components from flaking off onto the wafer. 

Sharkskin








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