Direct liquid injection (DLI) vaporisers offer improved performance
Brooks Instrument is launching a family of high-performance direct liquid injection (DLI) vaporisers. Designed for customers requiring reliable liquid vaporisation, the innovative Brooks DLI vaporisers deliver chemically pure vapour.Ed Fisher, solutions manager at Brooks Instrument, comments: "Working with key customers in the semiconductor, solar, fuel cell, glass coating, R&D and other markets, we have applied our application knowledge to develop the DLI vaporiser. Each DLI vaporiser is easily customisable for every customer's unique application requirements and also overcomes the many operational limitations of conventional vaporising technologies such as bubblers, or vapour draw systems and flash vaporisers. Additionally, none of the conventional vaporiser technologies can eliminate the potential for liquid carry-over and its attendant problems like a DLI vaporiser."
A Brooks DLI vaporiser employs heated gas, rather than a hot metal surface, to accomplish vaporisation. As liquid enters the heated gas chamber, it is atomised by a carrier gas stream. Once the atomised liquid contacts the hot gas, it immediately changes to vapour. The result is chemically pure vapour, free of decomposition by-products or liquid carry-over. Moreover, a Brooks DLI vaporiser can accept multiple liquid inlets and is claimed to generate perfectly mixed vapours. Brooks offers vaporiser designs to accommodate a wide range of liquid properties: low vapour pressures (below 1 torr), very low flow rates (less than 5g/hr), and high flow rates (more than 15kg/hr). Unlike bubblers and hot-surface vaporisers, Brooks DLI vaporisers are said to be highly efficient at producing vapour from liquid.
Every Brooks DLI vaporiser system is tailored to each customer's specific requirements and can be delivered as a fully integrated system or as individual components.
For more information, visit www.brooksinstrument.com
